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UMC ST (Super High Temperature)


Power consumption < 3.0kW

Temperature range 25-2000°C

Core dimensions o56mm x 200mm

Number of zones 14

Zone width 16mm

Heaters 16, W, isolated

Thermocouples 14, W-WRe, ANSI C
+ pyrometer

Crystal growth rate 1mm/day to 50mm/hour

Operation atmosphere vacuum

Coolant water

Control software

Isothermality 0.1% or better for one zone

Stability ±0.2°C

Temperature gradient <100°C/ cm

Positions vertical